Asahi Glass optical components provide high transmission, laser durability, good homogeneity, and low compression at UV to VUV wavelengths. Strict soot process control standards and proprietary technologies ensure the highest quality material standards required by large-size optical systems.

The synthetic quartz in Asahi Glass' AQ series is ideal for optical lens materials for all wavelengths from i-line to F2 lasers. New Extreme Ultraviolet (EUV) grades are currently under development.

• For i-line, g-line and the visible NIR region
• For high-energy KrF excimer-laser stepper/scanners
• For high energy ArF excimer-laser stepper/scanners
• For EUV, 13.5nm steppers/scanners