Photolithography – Synthetic Quartz for ARF & LCD Steppers
Photolithography – Synthetic Quartz for ARF & LCD Steppersaeusadmin2018-08-22T13:33:00-08:00
Synthetic Quartz for ARF & LCD Steppers
AGC’s optical components provide high transmission, laser durability, good homogeneity, and low compression at UV to VUV wavelengths. Strict process control standards and proprietary technologies ensure the highest quality material standards required by large-size optical systems.
The synthetic quartz in AGC’s AQ series is ideal for optical lens materials for all wavelengths from i-line to F2 lasers.
High transmittance for deep ultraviolet rays with frequencies < 200 nm ranging
from the i-ray to KrF, ArF, or Xe excimer lamps, and even for near infrared rays*1
Excellent Compaction/Rarefaction and Polarization Induced Birefringence (PIB) characteristics*2
Resistant to heat processing around 1,000°C*3
Excellent durability against high-energy laser beams
Thermal expansion as low as 1/10 times that of conventional glasses