SiC for Semiconductor Manufacturingaeusadmin2020-06-10T11:08:36-08:00
Silicon Carbide (SiC)
AGC offers a full line of high-purity recrystallized and CVD-Coated Silicon Carbide (SiC) furnace components for Vertical, Horizontal and Single Wafer processes. AGC’s SiC materials are preferred worldwide by furnace manufacturers and wafer fabs whose processes demand the use of high-purity precision components.
With ppb purity levels and a melting point of >1400°C, AGC’s CVD-Coated SiC is the material of choice for High-Temperature and LPCVD processes. Likewise, it is virtually impervious to acid etching, resulting in consistent and repeatable performance time after time.
AGC’s SiC materials are available in 150mm – 300mm for all major horizontal and vertical systems.
Material Strength at High Temperatures
Material Purity PPM By Weight
SiC + Si substrate
Comparison of Thermal Expansion Coefficient (CTE)
Chemical Etch Resistance
SiC vs. Quartz in LPCVD Processes
Superior CVD Coating
Quality and Manufacturing
Our superior ISO 9001:2015 certified process control system ensures that every step of manufacturing is an exacting process. From material granularity, to forming, sintering, machining, cleaning, CVD coating and multiple levels of inspection, our advanced techniques ensure the strictest requirements for purity and dimensional precision.
Every component we manufacture has a representative sample coupon which travels with the product through the entire manufacturing process. Coupons are analyzed for impurities prior to shipment and archived for a minimum of ten years.
SiC Technical Support
When you make a purchase from AGC, you are also making a partner. This partnership comes with a lifetime of technical support for your products. Our Technical Support Team spends most of its time in fabs, work hand-in-hand with you in helping to find solutions to some of your most complex applications.
We do it all, assisting equipment engineers and fab technicians with incoming inspection, to first-time installation, maintenance cleaning and troubleshooting. We will perform clean room audits, optimize your cleaning recipes for you, and make long-term recommendations to help you get the most out of your investment.